Setting of Z axis grid shift amount in detect unit. Setting of 4th axis grid shift amount in detect unit. Servo position loop gain all axes (Unit = 0.01 Sec-1). Backlash amount of X axis (0 to 2550 Microns). Backlash amount of Y axis (0 to 2550 Microns). Backlash amount of Z axis (0 to 2550 Microns). Backlash amount of 4th axis (0 to 2550 Microns).

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